6-inch
Paragon Carrier "FB15A101" is made from e-mateX®FB-0430 material family, which has a proven track record of carriers in the previous processing steps.
This is a 13-piece slot carrier designed for thin wafer (back-grinded wafer) in the succeeding process.
Stable quality in 13 slots is provided with tooling, not from conventional cutting work. In addition, its thin teeth are made longer to 15 mm so that thin wafers can be protected against deflection.
| Slot | 13 slots |
|---|---|
| External Dimensions | Overall length (A1): 155.48mm x width of flange (A2): 177.5mm x height (A3): 170.7mm |
| D1 Dimension | 22.49mm |
| Groove pitch | 9.525mm |
| Handle | Carrier with handle, or carrier without handle |
| Material | Standard material (FB-0431)/heat resistant material (FB-0432) The products to be made of FB-0437(new grade), after Apr.2022. |
