8-inch
Paragon Carrier FB20A106 is made from e-mateX®FB-0430 based material, which has a proven track record of carriers used in the preceding process.
This is a 13-piece slot carrier designed for thin wafer (back-grinded wafer) for the succeeding process.
Stable quality in 13 slots is provided with toolings, not from cutting-work to make conventional carriers.
In addition, its thin teeth is made longer to 20.15 mm so that thin wafers can be protected against deflection.
| Slot | 13 slots |
|---|---|
| External Dimensions | Overall length (A1): 214.74mm x width of flange (A2): 240mm x height (A3): 219.06mm |
| D1 Dimension | 34.93mm |
| Groove pitch | 12.7mm |
| Handle | Holed handle for fitting an ID marker, or no handle |
| Material | Standard material (FB-0431)/heat resistant material (FB-0432) The products to be made of FB-0437(new grade), after Apr.2022. |
